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Beneq Arradiance

GEMStar XT-P Thermal and PEALD 
This system is a powerful plasma enhanced system to extend your research and processing requirements to the next level using Plasma Enhanced ALD.
Features: Adjustable reactor temp up to 300C, Up to 200C uniform gas distribution delivery etc.
Applications: Atomic layer deposition

GEMStar XT-R Thermal ALD upgradeable to PEALD  
It provides the reactor and control capability to easily field upgrade to Plasma Enhanced (PEALD) in the future having capabilities of the GEMStar XT-P system. 
Features: Adjustable reactor temp up to 300C, Up to 200C uniform gas distribution delivery etc.
Applications: Atomic layer deposition

Details & Specification

The most configurable Thermal Atomic Layer Deposition system with a global installed base supporting a wide range of technologies and markets.
Features: Adjustable reactor temp up to 300C, Up to 200C uniform gas distribution delivery etc.
Applications: Atomic layer deposition

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